Measurement, Control & Improvement in Reclaim/Recycle/Reuse for Microelectronics

Mettler-Toledo Process Analytics Division announced the publication of a white paper entitled “Measurement, Control & Improvement in Reclaim/Recycle/Reuse for Microelectronics.” This paper addresses the challenges of monitoring and controlling ultrapure water used in the semiconductor manufacturing process to save cost and ensure optimal water consumption and reclaim/reuse.

Microelectronics facilities require as much as 460 cubic meters of ultrapure water per hour to manufacture product.   For example, every 1 US$ worth of water purchased by a semiconductor manufacturer requires 20 US$ to bring it to UPW levels, and another 10 US$ to treat it for discharge. The solution to optimising consumption of UPW is by reprocessing the water to allow either recycling or reuse in another process within the facility, saving cost.

METTLER TOLEDO provides the critical sensors and transmitters for analytical measurements in ultrapure water – resistivity/conductivity, TOC, temperature, pH and dissolved oxygen – to enable measurement and continuous control while working to increase the volume of water reclaimed for other uses, thus reducing cost and increasing efficiency.  It is now possible to achieve typical wastewater reclaim/recycle/reuse rates of up to 85% for today’s semiconductor fab or foundry.

Download the White Paper
Contact information
Craig Lazinsky
Mettler-Toledo Thornton, Inc.
Bedford, MA USA
Tel. +1-781-301-8626
E-mail: craig.lazinsky@mt.com