The semiconductor industry places stringent requirements on valves, measurement and control systems. Pneumatically operated valves are to an increasing degree no longer able to comply with the control requirements of leading process equipment manufacturers. For this reason, valve specialist GEMÜ has developed the motorized GEMÜ C53 iComLine control valve.
The 2/2-way diaphragm globe valve GEMÜ C53 iComLine was developed for precise and demanding control applications in semiconductor production. The sealing concept of the valve is based on the tried-and-tested GEMÜ PD design, with actuator and medium separated by a regulating cone made of resistant PTFE. As the regulating cone contour, actuator stroke and connection size can be customized to meet customers' requirements, the GEMÜ C53 iComLine satisfies virtually all control and flow requirements of the high-tech semiconductor industry. Thanks to the combination of the precise stepper motor with ultra pure body materials, the valve is particularly suitable for lithography, CMP and etching processes, as well as applications in the analysis field of any semiconductor production process.
The GEMÜ C53 iComLine diaphragm globe valve cannot only be installed as a simple 2/2-way valve. It can also be integrated into a GEMÜ PC50 iComLine M-block in order to realize complex flow charts using minimal space. For example, when machining silicon wafers, a multi-port valve block can be used in a FOUP cleaner to control the temperature of the DI water. In addition, check valves and sensors can be integrated into the GEMÜ PCi50 iComLine M-block.
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GEMU Valves Ltd
- +441925824044
- customer.support@gemu.co.uk
- http://www.gemu.co.uk
- 10 Olympic Way Birchwood Warrington Cheshire WA2 0YL GB
About us
GEMÜ is a world leading manufacturer of valves, measurement and control systems for liquids, vapours and gases, especially when it comes to solutions for sterile applications. The GEMÜ Group currently employs over 1900 members of staff worldwide.
Manufacturing is carried out at six manufacturing sites across Germany, Switzerland, China, Brazil, France and the USA. The Group is active on all five continents with 27 subsidiaries and has a large distributor network in more than 50 countries
With the increasing requirements for process engineering, we offer a wide range of products providing solutions for a broad spectrum of customer groups, such as:
Specialising in all of the processes involved in the pharmaceutical, biotechnology, cosmetics, food and beverage industries. Application brochure: Solutions for the pharmaceutical, foodstuffs and biotechnology industries.
Specialising in industrial water treatment, chemicals, processing industry, surface finishing, power generation and environmental engineering. Application brochure: Solutions for industrial applications.
Focusing on valves for the production of semiconductors and microchips, photovoltaic systems and batteries, and ultra-high-purity chemicals. Application brochure: Solutions for microelectronics, semiconductors and battery production.
- Service
Training courses for service and maintenance personnel, repair services and the commissioning of GEMÜ products directly at the customer's site.
GEMÜ GB is based in Warrington providing product sales and technical support. Our product quality, application knowledge and broad range of services, make us a market leader in our field within the UK.
GO GREEN & PAPERLESS!
New PDF product catalogues are available for download.
Click on the links below to download the new product catalogues. We recommend you open the links for download using Google Chrome browser.
Product Catalogue for the Pharmaceutical, Foodstuff and Biotechnology Industries
Product Catalogue for Industrial Applications
Product Catalogue for Semiconductor Production
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Where we supply to
UK Ireland
Industries we supply to
Chemicals, Food and Beverage, Pharmaceutical Cosmetics Toiletries, Water and Wastewater
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